Liquid crystal display device and method for manufacturing the same

ABSTRACT

A liquid crystal display device using a liquid crystal exhibiting a blue phase and having a novel structure, and a method for manufacturing the liquid crystal display device. A plurality of structure bodies (also referred to as ribs, protrusions, or projecting portions) are formed over the same substrate, and a pixel electrode and an electrode (a common electrode at a fixed potential) corresponding to the pixel electrode are formed thereover. An electric field is applied to the liquid crystal layer exhibiting a blue phase by using the pixel electrode that has an inclination and the electrode corresponding to the pixel electrode, which also has an inclination. A shorter distance between the adjacent structure bodies allows a strong electric field to be applied to the liquid crystal layer, which results in a reduction in power consumption for driving the liquid crystal.

BACKGROUND OF THE INVENTION Field of the Invention

The present invention relates to a semiconductor device including acircuit formed with a thin film transistor (hereinafter referred to as aTFT), and a method for manufacturing the semiconductor device. Thepresent invention relates to, for example, an electronic appliance onwhich an electro-optical device typified by a liquid crystal displaypanel is mounted as a component.

Note that in this specification, a semiconductor device refers to alldevices that can operate by using semiconductor characteristics, and anelectro-optical device, a semiconductor circuit, and an electronicappliance are all included in the semiconductor device.

Recent attention has focused on techniques for forming a thin filmtransistor (a TFT) by using a semiconductor thin film (with a thicknessof about several nanometers to several hundred nanometers) formed over asubstrate having an insulating surface. Thin film transistors areapplied to a wide range of electronic devices such as ICs andelectro-optical devices and have been rapidly developed, particularly asswitching elements in an image display device.

A liquid crystal display device is a typical example of the imagedisplay device. As a liquid crystal display mode, an IPS(In-Plane-Switching) mode and an FFS (Fringe Field Switching) mode aswell as a typical TN (Twisted Nematic) mode have been proposed.

Further, liquid crystal display devices using a liquid crystalexhibiting a blue phase have been attracting attention. It is disclosedby Kikuchi et al. that the temperature range of the blue phase can bewidened by polymer stabilization treatment, which is leading the way topractical application of the liquid crystal exhibiting a blue phase (seePatent Document 1).

REFERENCE Patent Document

-   [Patent Document 1] PCT International Publication No. WO2005/090520

SUMMARY OF THE INVENTION

A liquid crystal material exhibiting a blue phase has a short responsetime of 1 millisecond or less in the state of applying no voltage to thestate of applying voltage and allows high-speed response.

In the case of using a liquid crystal exhibiting a blue phase, anelectric field parallel to a substrate contributes to driving. A pair ofelectrodes provided over a substrate form an electric field parallel tothe substrate, so that optical modulation of a liquid crystal can beobtained. In that case, since a liquid crystal exhibiting a blue phasegenerally has high viscosity, an effective voltage cannot be appliedsufficiently to some regions when a voltage (an applied voltage) isapplied between the pair of electrodes.

According to one embodiment of the present invention, a liquid crystaldisplay device having a novel structure and a method for manufacturingthe same will be provided by using a liquid crystal exhibiting a bluephase.

A liquid crystal display device includes: a pair of substrates; a liquidcrystal layer exhibiting a blue phase, which is sealed between the pairof substrates; and a pair of electrodes for applying a voltage to theliquid crystal layer. One of the pair of electrodes is also referred toas a pixel electrode. At least one of the pair of substrates is asubstrate transmitting visible light, and typically, a glass substrateis used. In a display area, a plurality of gate wirings arranged inparallel to each other are provided to cross a plurality of sourcesignal lines. The pair of electrodes including the pixel electrode areprovided in an area separated by the plurality of gate wirings and theplurality of source signal lines. An electric field is applied to theliquid crystal layer exhibiting a blue phase by using the pixelelectrode that has an inclination and an electrode (a common electrodeat a fixed potential) corresponding to the pixel electrode, which alsohas an inclination.

In the case of an active matrix liquid crystal display device, a displayarea includes switching elements electrically connected to pixelelectrodes, typically, thin film transistors (also referred to as TFTs).A display pattern is formed on a screen when the pixel electrodesarranged in a matrix are driven. Specifically, when a voltage is appliedbetween a selected pixel electrode and another electrode correspondingto the pixel electrode, a liquid crystal layer provided between thepixel electrode and the other electrode is optically modulated, and thisoptical modulation is recognized as a display pattern by an observer.

One embodiment of the present invention disclosed in this specificationis a liquid crystal display device including: a first substrate and asecond substrate between which a liquid crystal layer containing aliquid crystal material exhibiting a blue phase is held; a plurality ofstructure bodies over the first substrate; a first electrode layer overthe plurality of structure bodies; an insulating layer over the firstelectrode layer; and a second electrode layer over the insulating layer,which overlaps the first electrode layer with the insulating layerinterposed therebetween. The plurality of structure bodies are arrangedat regular intervals. An angle between each side surface of theplurality of structure bodies and a plane surface of the first substrateis less than 90°. The second electrode layer overlaps the side surfaceof the structure body with the first electrode layer and the insulatinglayer interposed therebetween. The second electrode layer includes aplurality of openings.

In the above structure, the cross-sectional shape of each of theplurality of structure bodies (also referred to as ribs, protrusions, orprojecting portions) is a trapezoid, a half ellipse, a half circle, atriangle, or a shape with the top end or the bottom end having a radiusof curvature. Furthermore, each side surface of the plurality ofstructure bodies is inclined (less than 90°), whereby the insulatinglayer and the second electrode layer can be formed over the structurebodies with less defects in coverage in the case where the height of thestructure body is less than a cell gap. Note that the cell gap refers tothe maximum value of the thickness of a liquid crystal layer interposedbetween a pair of substrates. In the case where the inclination angle(also referred to as a taper angle) between the side surface of thestructure body and the plane surface of the first substrate is as largeas 90° or more, the insulating layer is not deposited on the sidesurfaces of the structure body, which may cause a short circuit betweenthe first electrode and the second electrode. In the case where theinclination angle of the structure body is as small as less than 10°, itis difficult to reduce the distance between the adjacent structurebodies; accordingly, the electrodes formed on the opposite inclinedsurfaces are apart from each other, leading to difficulty in obtaining asufficient effect. The distance between the centers of the adjacentstructure bodies is 20 μm or less, preferably 10 μm or less. A shorterdistance between the adjacent structure bodies allows a strong electricfield to be applied to the liquid crystal layer, which results in areduction in power consumption for driving the liquid crystal. When theinclination angle of the structure body is small and the distancebetween the adjacent structure bodies is too long, a strong electricfield cannot be easily applied to the liquid crystal layer.

There is no particular limitation on the shape of the top surface of thestructure body, and a rectangular shape, an elliptical shape, a circularshape, a waved shape, a zigzag shape, or the like can be employed. Theheight of the structure body is preferably determined by thevoltage-transmittance characteristics of a liquid crystal used. Anelectro-optical effect (phase contrast) of a blue phase is small ingeneral; therefore, in order to obtain a sufficient electro-opticaleffect, the height of the structure body needs to be in the range of 100nm to the cell gap. In consideration of the electro-optical effect of ablue phase, the structure body is formed to be 10 μm or less in height.Accordingly, the structure body is preferably made of an organic resinmaterial obtained by a coating method or the like.

Further, in the above structure, a storage capacitor can be formed witha pair of electrodes and an insulating layer interposed therebetweenwhich is used as a dielectric. The pair of electrodes (the firstelectrode layer and the second electrode layer) between which theinsulating layer is held are not electrically connected to each other.The storage capacitor has a suitably large capacitance, which isdetermined by the storage time, the leakage current of a thin filmtransistor arranged in a pixel portion, or the like. In addition, thestorage capacitor needs to have a suitably small capacitance as comparedto a signal line capacitance.

In the above structure, one of the pair of electrodes is a pixelelectrode, which is electrically connected to a thin film transistor ifit is provided in an active matrix liquid crystal display device, andthe other of the pair of electrodes is a common electrode at a fixedpotential (e.g., a ground potential). Either the common electrode or thepixel electrode has a top surface with a plurality of openings (alsoreferred to as slits).

Further, in the above structure, a large storage capacitor is formedbetween the pixel electrode and the common electrode, whereby morestable operating characteristics can be obtained. Note that the storagecapacitor is formed with an overlapping region of the pixel electrode,the common electrode, and an insulating layer that is used as adielectric. In order to increase the storage capacitance, it ispreferable that the insulating layer have a small thickness and be madeof an inorganic insulating material obtained by PCVD or sputtering. Theinsulating layer has a thickness of 10 nm to 600 nm, preferably 50 nm to300 nm.

The present invention also has a feature in the arrangement of at leastthree structure bodies and the positional relationship between a firstelectrode layer and a second electrode layer, and a liquid crystaldisplay device includes: a first substrate and a second substratebetween which a liquid crystal layer containing a liquid crystalmaterial exhibiting a blue phase is held; a first structure body, asecond structure body, and a third structure body over the firstsubstrate; a first electrode layer over the first structure body, thesecond structure body, and the third structure body; an insulating layerover the first electrode layer; and a second electrode layer whichoverlaps a side surface of the first structure body and a side surfaceof the third structure body with the insulating layer interposedtherebetween. The second electrode layer includes an opening. The firststructure body, the second structure body, and the third structure bodyare arranged at regular intervals. The second structure body is providedbetween the first structure body and the third structure body. Theopening in the second electrode layer overlaps the second structurebody.

By providing a stack of the first electrode layer, the insulating layer,and the second electrode layer over a side surface of at least onestructure body, an electric field including that in the directionparallel to a surface of the first substrate (a plane surface of thefirst substrate) is generated between the second electrode layer formedover the side surface of the one structure body and the first electrodelayer formed over a side surface of a structure body adjacent to the onestructure body. Thus, liquid crystal molecules are moved in a surfaceparallel to the surface of the first substrate, thereby controlling grayscales.

According to each of the above structures, an electric field includingthat in the direction substantially parallel to the first substrate(i.e., the horizontal direction) is generated, whereby a wide viewingangle can be achieved.

In each of the above structures, when the first electrode layer servesas a common electrode at a fixed potential, the second electrode layerserves as a pixel electrode electrically connected to a thin filmtransistor. The present invention also has a feature in manufacturingsteps in that case, and a method for manufacturing a liquid crystaldisplay device includes the steps of: forming a gate electrode layer anda plurality of structure bodies over a first substrate; forming a firstelectrode layer over the structure bodies; forming an insulating layerto cover the gate electrode layer and the first electrode layer; forminga semiconductor layer over the insulating layer, which overlaps the gateelectrode layer; forming a conductive layer over the semiconductorlayer; forming a second electrode layer over the conductive layer, whichis electrically connected to the semiconductor layer; and fixing asecond substrate to the first substrate with a liquid crystal layerinterposed therebetween. The second electrode layer partly overlaps thestructure bodies, the first electrode layer, and the insulating layer.In the structure obtained by this manufacturing method, a part of theinsulating layer serves as a gate insulating film of the thin filmtransistor, another part of the insulating layer insulates the firstelectrode layer from the second electrode layer, and a storage capacitoris formed with an overlapping portion of the first electrode layer, theinsulating layer, and the second electrode layer.

Furthermore, a third electrode layer is formed on the second substrate.The third electrode layer is at the same potential as the firstelectrode layer (a fixed potential), and the third electrode layeroverlaps the first electrode layer with the liquid crystal layerinterposed therebetween. The third electrode layer allows increasing thearea of an electric field applied to the liquid crystal layer. The thirdelectrode layer also allows a strong electric field to be applied to theliquid crystal layer, resulting in a reduction in power consumption fordriving the liquid crystal. The third electrode layer is arranged so asnot to overlap the second electrode layer with the liquid crystal layerinterposed therebetween.

In each of the above structures, when the first electrode layer servesas a pixel electrode electrically connected to the thin film transistor,the second electrode layer serves as a common electrode at a fixedpotential. In the case where the second electrode layer is at a fixedpotential and the third electrode layer is formed on the secondsubstrate, the third electrode layer is at the same potential as thesecond electrode layer (a fixed potential). The third electrode layerallows a strong electric field to be applied to the liquid crystallayer, resulting in a reduction in power consumption for driving theliquid crystal. The third electrode layer is arranged so as to overlapthe second electrode with the liquid crystal layer interposedtherebetween.

In each of the above structures, since a liquid crystal materialexhibiting a blue phase is used for the liquid crystal layer, switchingof color for displaying one color in one field can be performed in 1/180seconds or less, i.e., about 5.6 milliseconds or less. The liquidcrystal material exhibiting a blue phase has a short response time of 1millisecond or less and allows high-speed response, resulting in higherperformance of a liquid crystal display device. The liquid crystalmaterial exhibiting a blue phase includes a liquid crystal and a chiralagent. The chiral agent is employed to align the liquid crystal in ahelical structure and to make the liquid crystal exhibit a blue phase.For example, a liquid crystal material including a chiral agent mixed at5 wt % or more may be used for the liquid crystal layer. As the liquidcrystal, a thermotropic liquid crystal, a low-molecular liquid crystal,a high-molecular liquid crystal, a ferroelectric liquid crystal, ananti-ferroelectric liquid crystal, or the like is used. These liquidcrystal materials exhibit a cholesteric phase, a cholesteric blue phase,a smectic phase, a smectic blue phase, a cubic phase, a chiral nematicphase, an isotropic phase, or the like depending on conditions. As thechiral agent, a material having a high compatibility with a liquidcrystal and a strong twisting power is used. Furthermore, eitherR-enantiomer or S-enantiomer is preferably used, and a racemic mixturecontaining R- and S-enantiomers at 50:50 is not used.

A cholesteric blue phase and a smectic blue phase, which are kinds ofblue phase, are observed in a liquid crystal material having acholesteric phase or a smectic phase with a relatively short helicalpitch of 500 nm or less. The alignment of the liquid crystal materialhas a double twist structure. Having the order of less than or equal toan optical wavelength, the liquid crystal material is transparent, andoptical modulation action occurs through a change in alignment order byvoltage application. The blue phase is optically isotropic and thus hasno viewing angle dependence and does not require an alignment film,resulting in an improvement in display image quality and cost reduction.

The blue phase appears only within a narrow temperature range;therefore, it is preferable that a photocurable resin and aphotopolymerization initiator be added to a liquid crystal material andpolymer stabilization treatment be performed in order to extend thetemperature range. The polymer stabilization treatment is performed insuch a manner that a liquid crystal material including a liquid crystal,a chiral agent, a photocurable resin, and a photopolymerizationinitiator is irradiated with light having a wavelength, with which thephotocurable resin and the photopolymerization initiator react. Lightirradiation in this polymer stabilization treatment may be performed inthe state where a liquid crystal material exhibits an isotropic phase ora blue phase under the control of temperature. For example, the polymerstabilization treatment is performed in the following manner: thetemperature of a liquid crystal layer is controlled so as to exhibit ablue phase, and the liquid crystal layer is irradiated with light inthat state. Note that the polymer stabilization treatment is not limitedto this manner and may be carried out by performing light irradiation inthe state where a liquid crystal layer exhibits an isotropic phase at atemperature within +10° C., preferably +5° C. of the phase transitiontemperature between the blue phase and the isotropic phase. The phasetransition temperature between the blue phase and the isotropic phase isa temperature at which the phase changes from the blue phase to theisotropic phase when the temperature rises, or a temperature at whichthe phase changes from the isotropic phase to the blue phase when thetemperature falls. An example of the polymer stabilization treatment isas follows: after a liquid crystal layer is heated to exhibit anisotropic phase, the liquid crystal layer is gradually cooled to exhibita blue phase and then irradiated with light while keeping thetemperature at which the blue phase is exhibited. Alternatively, after aliquid crystal layer is gradually heated to exhibit an isotropic phase,the liquid crystal layer can be irradiated with light at a temperaturewithin +10° C., preferably +5° C. of the phase transition temperaturebetween the blue phase and the isotropic phase (in the state ofexhibiting the isotropic phase). In the case where an ultravioletcurable resin (a UV curable resin) is used as the photocurable resinincluded in the liquid crystal material, the liquid crystal layer may beirradiated with ultraviolet rays. Even in the case where the blue phaseis not exhibited, if polymer stabilization treatment is performed byirradiation with light at a temperature within +10° C., preferably +5°C. of the phase transition temperature between the blue phase and theisotropic phase (in the state of exhibiting the isotropic phase), theresponse time can be made as short as 1 millisecond or less andhigh-speed response is possible.

In this specification, a gate electrode layer refers to a portion whichoverlaps a semiconductor layer with a gate insulating film interposedtherebetween and overlaps a portion forming a channel of a thin filmtransistor, and a gate wiring layer refers to the other portion. Notethat a part of a pattern made of the same conductive material is a gateelectrode layer and the other part is a gate wiring layer.

In this specification, a semiconductor layer of a thin film transistormay be a semiconductor film containing silicon as its main component ora semiconductor film containing a metal oxide as its main component.Examples of the semiconductor film containing silicon as its maincomponent include an amorphous semiconductor film, a semiconductor filmhaving a crystalline structure, and a compound semiconductor film havingan amorphous structure, and specifically, amorphous silicon,microcrystalline silicon, polycrystalline silicon, single crystalsilicon, or the like can be used. For the semiconductor film containinga metal oxide as its main component, zinc oxide (ZnO), indium galliumzinc oxide (In—Ga—Zn—O), or the like can be used.

In this specification, a thin film transistor may have a variety ofstructures, and for example, a top-gate TFT, a bottom-gate TFT, abottom-contact TFT, or a staggered TFT can be employed. Further, it ispossible to use not only a transistor with a single-gate structure, butalso a multi-gate transistor having a plurality of channel formingregions, e.g., a double-gate transistor. Moreover, a dual-gatetransistor having gate electrodes above and below a semiconductor layermay also be used.

In this specification, a term indicating a direction such as “on”,“over”, “under”, “below”, “side”, “horizontal”, or “perpendicular” isbased on the assumption that a device is provided over the surface of afirst substrate.

The pixel electrode having an inclination and the electrode (the commonelectrode at a fixed potential) corresponding to the pixel electrode,which also has an inclination, make it possible to achieve high-speedresponse, high transmittance, or a wide viewing angle of a liquidcrystal display device.

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings:

FIGS. 1A to 1C are cross-sectional views of one embodiment of thepresent invention;

FIGS. 2A and 2B are respectively a top view and a cross-sectional viewof one embodiment of the present invention;

FIG. 3 is a top view of one embodiment of the present invention;

FIG. 4 is a cross-sectional view of one embodiment of the presentinvention;

FIGS. 5A and 5B are cross-sectional views of one embodiment of thepresent invention;

FIGS. 6A and 6B are graphs showing the result of calculating an electricfield mode in a liquid crystal display device;

FIGS. 7A and 7B are graphs showing the result of calculating an electricfield mode in a liquid crystal display device;

FIGS. 8A and 8B are graphs showing the result of calculating an electricfield mode in a liquid crystal display device;

FIGS. 9A and 9B are graphs showing the result of calculating an electricfield mode in a liquid crystal display device;

FIGS. 10A and 10B are graphs showing the result of calculating anelectric field mode in a liquid crystal display device;

FIGS. 11A and 11B are graphs showing the result of calculating anelectric field mode in a liquid crystal display device;

FIGS. 12A and 12B are block diagrams of a display device;

FIG. 13 is a timing chart;

FIG. 14 is a cross-sectional view of a thin film transistor;

FIGS. 15A and 15B are cross-sectional views of a semiconductor layer;

FIGS. 16A1 and 16A2 are top views and FIG. 16B is a cross-sectional viewof a liquid crystal module;

FIG. 17 is a cross-sectional view of a liquid crystal display device;

FIGS. 18A and 18B are perspective views of electronic appliances;

FIGS. 19A and 19B are perspective views of electronic appliances; and

FIGS. 20A and 20B are graphs showing the result of calculating anelectric field mode in a liquid crystal display device.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the present invention will be described in detail withreference to drawings. Note that the present invention is not limited tothe description below, and it is apparent to those skilled in the artthat modes and details can be modified in various ways. Accordingly, thepresent invention should not be construed as being limited to thedescription of the embodiments given below.

(Embodiment 1)

In one mode of this embodiment, an example of the positionalrelationship between a first electrode layer and a second electrodelayer in a liquid crystal display device will be illustrated in FIG. 1A.

FIG. 1A is an example of a schematic cross-sectional view of a liquidcrystal cell.

FIG. 1A illustrates a liquid crystal display device in which a firstsubstrate 200 and a second substrate 201 are arranged to face each otherand a liquid crystal layer 208 using a liquid crystal materialexhibiting a blue phase is held between the first substrate 200 and thesecond substrate 201. The liquid crystal display device includes,between the first substrate 200 and the liquid crystal layer 208,structure bodies 233 a, 233 b, and 233 c, a first electrode layer 232serving as a common electrode, an insulating layer 234, and secondelectrode layers 230 a, 230 b, and 230 c serving as pixel electrodes.The second electrode layers 230 a, 230 b, and 230 c serving as pixelelectrodes are electrically connected to each other, and have a topsurface including openings (slits) overlapping the structure bodies 233a and 233 c. The structure bodies 233 a, 233 b, and 233 c are providedto project into the liquid crystal layer 208 from the surface of thefirst substrate 200 on which the liquid crystal layer 208 is provided.

The first electrode layer 232 serving as a common electrode is formedover the structure bodies 233 a, 233 b, and 233 c provided over thefirst substrate 200. The insulating layer 234 is formed to cover thefirst electrode layer 232 serving as a common electrode. The secondelectrode layer 230 b is formed over the insulating layer 234 to overlapthe structure body 233 b.

In the liquid crystal display device of FIG. 1A, when an electric fieldis applied between the first electrode layer 232 serving as a commonelectrode and the second electrode layers 230 a, 230 b, and 230 cserving as pixel electrodes which have an opening pattern and hold aliquid crystal, a horizontal electric field (in a direction parallel tothe first substrate) is applied to the liquid crystal layer 208, wherebyliquid crystal molecules can be controlled with the electric field.

For example, when a voltage is applied so that a potential difference isgenerated between the pixel electrode and the common electrode, ahorizontal electric field indicated by an arrow 202 a is applied betweenthe second electrode layer 230 a serving as the pixel electrode and thefirst electrode layer 232 serving as the common electrode, and ahorizontal electric field indicated by an arrow 202 b is applied betweenthe second electrode layer 230 b and the first electrode layer 232. Apart of the first electrode layer 232 which is provided to overlap thestructure body 233 b overlaps the second electrode layer 230 b with theinsulating layer 234 interposed therebetween, thereby forming a storagecapacitor. The horizontal electric field indicated by the arrow 202 b isgenerated between a part of the first electrode layer 232 which isformed on an inclined surface of the structure body 233 a and a part ofthe second electrode layer 230 b which is formed on an inclined surfaceof the structure body 233 b adjacent to the structure body 233 a.

The structure bodies 233 a, 233 b, and 233 c can be formed of aninsulator using an insulating material (an organic insulating materialand an inorganic insulating material) and a conductor using a conductivematerial (an organic material and an inorganic material). Typically, itis preferable to use a visible light curable resin, an ultravioletcurable resin, or a thermosetting resin, and for example, an acrylicresin, an epoxy resin, or an amine resin can be used. Alternatively, thestructure bodies can be formed of a conductive resin or a metalmaterial. Note that the structure bodies may have a stacked structure ofplural thin films. The structure bodies may have a conical or pyramidalshape with a plane top surface and a trapezoidal cross section, aconical or pyramidal shape with a rounded dome top surface, or the like.The structure bodies 233 a, 233 b, and 233 c only need to have a crosssection with an inclined side surface. The structure bodies 233 a, 233b, and 233 c may have a step-like cross section including two or moresteps on one side surface.

In FIG. 1A, the structure bodies 233 a, 233 b, and 233 c have atrapezoidal cross section. The trapezoidal cross section, not arectangular cross section, allows the second electrode layer 230 bhaving an inclination to be formed on the side surface of the structurebody 233 b. The pixel electrode having an inclination and the firstelectrode layer 232 (the common electrode) corresponding to the pixelelectrode, which also has an inclination, make it possible to achievehigh-speed response, high transmittance, or a wide viewing angle of theliquid crystal display device.

FIG. 1B illustrates an example in which the second electrode layersserving as the pixel electrodes are arranged in a manner different fromthat illustrated in FIG. 1A. Second electrode layers 230 d, 230 e, 230f, and 230 g serving as pixel electrodes are not provided at least overa part of the insulating layer 234 which overlaps the plane top surfaceof the structure body 233 b. In FIG. 1B, a horizontal electric fieldindicated by an arrow 202 c is applied between the second electrodelayer 230 d serving as the pixel electrode and the first electrode layer232 serving as the common electrode, and a horizontal electric fieldindicated by an arrow 202 d is applied between the second electrodelayer 230 e and the first electrode layer 232. As shown here, an effectsimilar to that shown in FIG. 1A can be obtained in the structure ofFIG. 1B. Note that the area of the first electrode layer 232 whichoverlaps the pixel electrode with the insulating layer 234 interposedtherebetween is smaller in FIG. 1B than in FIG. 1A; therefore, thestructure of FIG. 1A is preferably used in order to increase the storagecapacitance.

FIG. 1C illustrates an example in which the area of the pixel electrodeis even smaller than that of FIG. 1B. Second electrode layers 230 h, 230i, 230 j, and 230 k serving as pixel electrodes are provided only on theinclined surfaces of the structure body 233 b. In FIG. 1C, a horizontalelectric field indicated by an arrow 202 e is applied between the secondelectrode layer 230 h serving as the pixel electrode and the firstelectrode layer 232 serving as the common electrode, and a horizontalelectric field indicated by an arrow 202 f is applied between the secondelectrode layer 230 i and the first electrode layer 232. As shown here,an effect similar to that shown in FIG. 1B can be obtained in thestructure of FIG. 1C. Note that the area of the first electrode layer232 which overlaps the pixel electrode with the insulating layer 234interposed therebetween is smaller in FIG. 1C than in FIG. 1B;therefore, the structure of FIG. 1B is preferably used in order toincrease the storage capacitance.

When the pixel electrode and the common electrode are provided at leaston the side surface of the structure body to be inclined, a strongelectric field can be applied to the liquid crystal layer and powerconsumption for driving a liquid crystal can be reduced.

Furthermore, even in the case where misalignment occurs in patterning ofthe pixel electrode, substantially the same electric field can beapplied to the liquid crystal layer as long as the pixel electrode isprovided to overlap at least the side surface of the structure body, andsubstantially the same storage capacitance can be obtained because thearea of the pixel electrode which overlaps the common electrode remainsalmost unchanged even when misalignment occurs. Accordingly, patterningof the pixel electrode can be performed with a wide margin and highyield.

FIGS. 6B, 7B, 8B, and 20B show the results of calculating the electricfield applied in liquid crystal display devices. FIGS. 6A, 7A, 8A, and20A are diagrams illustrating the structures of the liquid crystaldisplay devices used for calculation.

The calculation was performed using LCD Master, 2s Bench manufactured byShintec Company Limited, and an insulator with a dielectric of 4 wasused as the structure bodies 233 a, 233 b, and 233 c. The structurebodies 233 a, 233 b, and 233 c each have a thickness (height) of 5 μm.The cross sections of the second electrode layer 230 a and a secondelectrode layer 802 serving as pixel electrodes, the first electrodelayer 232 and first electrode layers 803 a and 803 b serving as commonelectrodes, and the insulating layer 234 each have a thickness of 0.25μm, and the cross sections of the second electrode layer 802 and thefirst electrode layers 803 a and 803 b each have a width of 4 μm. Thesecond electrode layer in FIGS. 6A and 6B has a bowl shape with a heightof 5 μm and a width of 8 μm, the second electrode layer in FIGS. 7A and7B has a V shape with a height of 4.75 μm and a width of 3.4 μm, and thesecond electrode layer in FIGS. 8A and 8B has a sloped shape with aheight of 4.75 μm and a width of 2 μm. In FIGS. 20A and 20B, thedistance between the second electrode layer 802 and each of the firstelectrode layers 803 a and 803 b in a direction parallel to thesubstrate is 6 μm, and the thickness of the liquid crystal layer is 10μm. Note that a voltage applied to the first electrode layer serving asthe common electrode is set to 0 V and a voltage applied to the secondelectrode layer serving as the pixel electrode is set to 10 V.

FIGS. 6A and 6B, FIGS. 7A and 7B, and FIGS. 8A and 8B are calculationresults corresponding to FIG. 1A, FIG. 1B, and FIG. 1C, respectively.

FIGS. 20A and 20B show a comparative example, in which the firstelectrode layers 803 a and 803 b serving as the common electrodes andthe second electrode layer 802 serving as the pixel electrode arealternately provided between a first substrate 800 and a liquid crystallayer 808, and sealed with a second substrate 801.

In FIGS. 6B, 7B, 8B, and 20B, a solid line represents an equipotentialline marked at intervals of 0.5 V, and the arrangement of the pixelelectrode and the common electrode corresponds to that illustrated inFIGS. 6A, 7A, 8A, and 20A, respectively.

Since an electric field is applied perpendicularly to the equipotentialline, it is found that a horizontal electric field is applied betweenthe pixel electrode and the common electrode as illustrated in FIGS. 6B,7B, and 8B. Even in the structure of FIG. 8A in which the pixelelectrode is provided only on the inclined surface, an almostperpendicular equipotential line appears in FIG. 8B and a horizontalelectric field is formed in a wide range of the liquid crystal layer.

On the other hand, in the comparative example of FIG. 20B, anequipotential line appears and an electric field is formed in the liquidcrystal layer in the proximity of the first substrate 800 over which thesecond electrode layer 802 serving as the pixel electrode and the firstelectrode layers 803 a and 803 b serving as the common electrodes arealternately formed; however, the potential line disappears and apotential difference is not generated in the region where the liquidcrystal layer gets closer to the second substrate 801. Thus, an electricfield is not formed in the liquid crystal layer 808 in the proximity ofthe second substrate 801, and it is found that the response of allliquid crystal molecules in the liquid crystal layer is difficult tomake in the structure of FIGS. 20A and 20B.

(Embodiment 2)

One embodiment of the invention disclosed in this specification can beapplied to either a passive matrix liquid crystal display device or anactive matrix liquid crystal display device. An example of the activematrix liquid crystal display device will be described with reference toFIGS. 2A and 2B.

FIG. 2A is a plan view of a liquid crystal display device, whichillustrates one pixel. FIG. 2B is a cross-sectional view along lineX1-X2 of FIG. 2A.

In FIG. 2A, a plurality of source wiring layers (including a wiringlayer 405 a) are arranged to be parallel to each other (extend in thevertical direction in the drawing) and apart from each other. Aplurality of gate wiring layers (including a gate electrode layer 401)are arranged to extend in a direction substantially perpendicular to thesource wiring layers (in the horizontal direction in the drawing) and tobe apart from each other. Common wiring layers are provided adjacent tothe respective gate wiring layers and extend in a directionsubstantially parallel to the gate wiring layers, that is, in adirection substantially perpendicular to the source wiring layers (inthe horizontal direction in the drawing). A roughly rectangular space issurrounded by the source wiring layers, the common wiring layers, andthe gate wiring layers. In this space, a pixel electrode layer and acommon electrode layer of the liquid crystal display device areprovided. A thin film transistor 420 driving the pixel electrode layeris provided at the upper-left corner in the drawing. A plurality ofpixel electrode layers and thin film transistors are provided in amatrix.

In the liquid crystal display device of FIGS. 2A and 2B, a secondelectrode layer 446 electrically connected to the thin film transistor420 serves as a pixel electrode layer, and a first electrode layer 447electrically connected to the common wiring layer serves as a commonelectrode layer. Note that a storage capacitor is formed with the pixelelectrode layer and the common electrode layer. Although the commonelectrode layer can operate in a floating state (an electricallyisolated state), the common electrode layer is set to a fixed potential,preferably to a potential around a common potential (an intermediatepotential of an image signal which is transmitted as data) in such alevel as not to generate flickers.

The first electrode layer 447 and the second electrode layer 446 can beformed of a light-transmitting conductive material such as indium oxidecontaining tungsten oxide, indium zinc oxide containing tungsten oxide,indium oxide containing titanium oxide, indium tin oxide containingtitanium oxide, indium tin oxide (hereinafter referred to as ITO),indium zinc oxide, or indium tin oxide to which silicon oxide is added.

A conductive composition containing a conductive high molecule (alsoreferred to as a conductive polymer) can be used for the first electrodelayer 447 and the second electrode layer 446. The pixel electrode madeof the conductive composition preferably has a sheet resistance of 10000ohms per square or less and a transmittance of 70% or more at awavelength of 550 nm. Furthermore, the resistivity of the conductivehigh molecule contained in the conductive composition is preferably 0.1Ω·cm or less.

As the conductive high molecule, a so-called π-electron conjugatedconductive polymer can be used. For example, it is possible to usepolyaniline or a derivative thereof, polypyrrole or a derivativethereof, polythiophene or a derivative thereof, or a copolymer of two ormore kinds of them.

As illustrated in FIG. 2B, the first electrode layer 447 having a flatshape and the second electrode layer 446 having an opening pattern areprovided under a liquid crystal layer 444. The flat-shaped firstelectrode layer 447 and the second electrode layer 446 having a patternof a plurality of openings at least partly overlap each other with aninsulating layer 402 interposed therebetween. A plurality of structurebodies are provided under the first electrode layer 447 at substantiallyregular intervals. In FIG. 2A, the top surface of the structure body hasa rod shape with both ends in an arc, and the long axis of the topsurface of the structure body is in a direction oblique to the gatewiring layer. In addition, the openings (also referred to as slits) inthe second electrode layer 446 are arranged in the same direction as thestructure bodies, that is, the long-axis direction of the top surface ofthe opening is oblique to the gate wiring layer.

As for the cross-sectional shapes of the plurality of structure bodies,the bottom end of the structure body has an elliptical or circular sidesurface having a center on the outside of the side surface of thestructure body, and the top end of the structure body has an ellipticalor circular side surface having a center on the inside of the sidesurface of the structure body. In other words, the bottom end of thestructure body has a curved side surface that is determined by a centerof curvature above a tangent to the bottom end and by a first radius ofcurvature, and the top end of the structure body has a curved sidesurface that is determined by a center of curvature below a tangent tothe top end and by a second radius of curvature. Such cross-sectionalshapes of the plurality of structure bodies can be obtained using aphotosensitive resin and allows reducing defects in coverage with thefirst electrode layer 447, the insulating layer 402, and the secondelectrode layer 446 formed over the structure bodies.

In FIGS. 2A and 2B, a first structure body 433 a, a second structurebody 433 b, a third structure body 433 c, a fourth structure body 433 d,and a fifth structure body 433 e are arranged over a first substrate 441at substantially regular intervals, and the first electrode layer 447(e.g., a common electrode for applying a common voltage to all pixels)is formed thereover. Note that the first electrode layer 447 is alsoprovided between the structure bodies.

The first electrode layer 447, the insulating layer 402, and the secondelectrode layer 446 are stacked on the side surfaces and top surface ofthe first structure body 433 a. The first structure body 433 a isadjacent to the fourth structure body 433 d, and the top surface of thefourth structure body 433 d is smaller in size than that of the firststructure body 433 a. Further, the fourth structure body 433 d isadjacent to the fifth structure body 433 e, and the top surface of thefourth structure body 433 d is larger in size than that of the fifthstructure body 433 e.

The first electrode layer 447 and the insulating layer 402 are stackedon the side surfaces and top surface of the second structure body 433 badjacent to the first structure body 433 a. The top surface of thesecond structure body 433 b has substantially the same shape as the topsurface of the first structure body 433 a. In addition, the secondstructure body 433 b overlaps the opening in the second electrode layer446 as illustrated in FIG. 2A. Note that in FIG. 2A, the outline of eachstructure body is represented by a dotted line. The opening in thesecond electrode layer 446 is larger in area than the top surface of thesecond structure body 433 b, and therefore the second structure body 433b does not overlap the second electrode layer 446.

The first electrode layer 447, the insulating layer 402, and the secondelectrode layer 446 are stacked on the side surfaces and top surface ofthe third structure body 433 c adjacent to the second structure body 433b. The top surface of the third structure body 433 c has substantiallythe same shape as the top surface of the first structure body 433 a.

The first electrode layer 447 and the second electrode layer 446 are notelectrically connected to each other. When a voltage is applied betweenthe first electrode layer 447 and the second electrode layer 446, anelectric field including at least an electric field parallel to a planesurface of the first substrate 441 can be formed between a part of thesecond electrode layer 446 which is provided on one inclined surface ofthe first structure body 433 a and a part of the first electrode layer447 which is provided on one inclined surface of the second structurebody 433 b facing the one inclined surface of the first structure body.At the same time, an electric field including at least an electric fieldparallel to the plane surface of the first substrate 441 can be formedbetween a part of the first electrode layer 447 which is provided on theother inclined surface of the second structure body 433 b and a part ofthe second electrode layer 446 which is provided on one inclined surfaceof the third structure body 433 c facing the other inclined surface ofthe second structure body 433 b.

The second electrode layer 446 is electrically connected to the thinfilm transistor. The thin film transistor 420 is a bottom-gate thin filmtransistor and includes, over the first substrate 441 that is asubstrate having an insulating surface, the gate electrode layer 401,the insulating layer 402 serving as a gate insulating layer, asemiconductor layer 403, n⁺ layers 404 a and 404 b serving as a sourceregion and a drain region, and wiring layers 405 a and 405 b serving asa source electrode layer and a drain electrode layer. The firstelectrode layer 447 is formed over the first substrate 441 in the samelayer as the gate electrode layer 401, and is a flat-shaped electrodelayer in the pixel.

In this embodiment, a part of the insulating layer 402 serves as thegate insulating layer and another part serves as an insulating layerpreventing a short circuit between the first electrode layer and thesecond electrode layer, resulting in a reduction in the number of steps.

The insulating layer 402 can be formed with a single layer or stackedlayers of a silicon oxide layer, a silicon nitride layer, a siliconoxynitride layer, or a silicon nitride oxide layer, which is formed byplasma CVD, sputtering, or the like. Alternatively, a silicon oxidelayer formed by CVD using an organosilane gas can be used for theinsulating layer 402 serving as a gate insulating layer. As theorganosilane gas, it is possible to use a silicon-containing compoundsuch as tetraethoxysilane (TEOS) (chemical formula: Si(OC₂H₅)₄),tetramethylsilane (TMS) (chemical formula: Si(CH₃)₄),tetramethylcyclotetrasiloxane (TMCTS), octamethylcyclotetrasiloxane(OMCTS), hexamethyldisilazane (HMDS), triethoxysilane (SiH(OC₂H₅)₃), ortrisdimethylaminosilane (SiH(N(CH₃)₂)₃).

An insulating film 407 is provided as a protective film to cover thethin film transistor 420 and be in contact with the semiconductor layer403. The insulating film 407 covering the thin film transistor 420 canbe formed with an inorganic insulating film or organic insulating filmformed by a wet method or a dry method. For example, it is possible touse an inorganic insulating material such as a silicon nitride film, asilicon oxide film, or a silicon oxynitride film, which is formed byCVD, sputtering, or the like.

The liquid crystal layer 444 is made of a liquid crystal materialexhibiting a blue phase, and sealed with a second substrate 442 that isa counter substrate. An optical film such as a polarizing plate, aretardation plate, an anti-reflection film, a color filter, alight-shielding film (also referred to as a black matrix) is provided asappropriate. For example, circular polarization by a polarizing plateand a retardation plate may be used. FIG. 2B illustrates alight-transmitting liquid crystal display device performing display bytransmitting light from a light source; accordingly, the first substrate441 and the second substrate 442 are light-transmitting substrates andpolarizing plates 443 a and 443 b are provided on the respectiveoutsides thereof (on the side opposite to the liquid crystal layer 444).As the light source, a backlight, a side light, or the like may be used.As the backlight or the side light, a plurality of light-emitting diodes(hereinafter referred to as LEDs) as well as a cold cathode fluorescentlamp can be used. As the method using LEDs, there are a method using awhite LED and a method called a field-sequential method that uses a redLED, a green LED, and a blue LED and uses no color filter. Thefield-sequential method requires high-speed driving with at least threetimes higher speed. In this embodiment, the field-sequential method isused while a liquid crystal material exhibiting a blue phase is used;accordingly, switching of color for displaying one color in one fieldcan be performed in 1/180 seconds or less, i.e., about 5.6 millisecondsor less.

An insulating film serving as a base film may be provided between thefirst substrate 441, and the gate electrode layer 401 and the firstelectrode layer 447. The base film has a function of preventingdiffusion of an impurity element from the substrate 441, and can beformed with a single layer or stacked layers of a silicon nitride film,a silicon oxide film, a silicon nitride oxide film, and a siliconoxynitride film. The gate electrode layer 401 can be formed with asingle layer or stacked layers using a metal material such asmolybdenum, titanium, chromium, tantalum, tungsten, aluminum, copper,neodymium, or scandium, or an alloy material containing any of thesematerials as its main component. The use a light-shielding conductivefilm for the gate electrode layer 401 can prevent light from a backlight(light emitted through the first substrate 441) from entering thesemiconductor layer 403.

For example, as a two-layer structure of the gate electrode layer 401,the following two-layer structures are preferably used: an aluminumlayer and a molybdenum layer stacked thereover, a copper layer and amolybdenum layer stacked thereover, a copper layer and a titaniumnitride layer or a tantalum nitride layer stacked thereover, and atitanium nitride layer and a molybdenum layer stacked thereover. As athree-layer structure, it is preferable to use a stack of a tungstenlayer or a tungsten nitride layer, a layer of an alloy of aluminum andsilicon or an alloy of aluminum and titanium, and a titanium nitridelayer or a titanium layer.

In this embodiment, an oxide semiconductor film is used as thesemiconductor layer 403.

In this specification, a thin film represented by InMO₃ (ZnO)_(m) (m>0)is preferably used as an oxide semiconductor. In the thin filmtransistor 420, a thin film represented by InMO₃(ZnO)_(m) (m>0) isformed and the thin film is used as the semiconductor layer 403. Notethat M denotes one or more of metal elements selected from gallium (Ga),iron (Fe), nickel (Ni), manganese (Mn), and cobalt (Co). For example, Mdenotes Ga in some cases, and in other cases, M contains other metalelements in addition to gallium Ga, such as Ga and Ni or Ga and Fe.Furthermore, the above oxide semiconductor may contain a transitionmetal element such as Fe or Ni or an oxide of the transition metal as animpurity element in addition to a metal element contained as M. Forexample, an In—Ga—Zn—O-based non-single-crystal film can be used as theoxide semiconductor layer.

When M is gallium (Ga) in the InMO₃(ZnO), (m>0) film (layer), this thinfilm is also called an In—Ga—Zn—O based non-single-crystal film in thisspecification. In the In—Ga—Zn—O-based non-single-crystal film, anamorphous structure is observed by X-ray diffraction (XRD) analysis evenwhen the film is subjected to heat treatment at a temperature of 200° C.to 500° C., typically 300° C. to 400° C. for 10 minutes to 100 minutesafter deposited by sputtering. In addition, it is possible tomanufacture a thin film transistor having such electric characteristicsas an on/off ratio of 10⁹ or more and a mobility of 10 or more at a gatevoltage of −20 V to +20 V. An In—Ga—Zn—O-based non-single-crystal filmdeposited by sputtering using a target in which In₂O₃:Ga₂O₃:ZnO is 1:1:1has a photosensitivity at a wavelength of 450 nm or less.

An In—Ga—Zn—O-based non-single-crystal film can be used for thesemiconductor layer 403 and the n⁺ layers 404 a and 404 b serving as asource region and a drain region. The n⁺ layers 404 a and 404 b areoxide semiconductor layers each having a lower resistance than thesemiconductor layer 403. For example, the n⁺ layers 404 a and 404 b haven-type conductivity and an activation energy (ΔE) of 0.01 eV to 0.1 eV.The n⁺ layers 404 a and 404 b are In—Ga—Zn—O-based non-single-crystalfilms and include at least an amorphous component. The n⁺ layers 404 aand 404 b include a crystal grain (nanocrystal) in the amorphousstructure in some cases. The crystal grain (nanocrystal) in the n⁺layers 404 a and 404 b has a diameter of 1 nm to 10 nm, and typicallyabout 2 nm to 4 nm.

By providing the n⁺ layers 404 a and 404 b, a good contact can be madebetween the semiconductor layer 403 which is an oxide semiconductorlayer and each of the wiring layers 405 a and 405 b which are metallayers, resulting in higher thermal stability than in Schottky junction.Actively providing the n⁺ layers is effective in supplying carriers tothe channel (on the source side), stably absorbing carriers from thechannel (on the drain side), or preventing the formation of a resistancecomponent at the interface between each of the wiring layers and thesemiconductor layer. Furthermore, good mobility can be maintained evenat a high drain voltage because of a lower resistance.

A first In—Ga—Zn—O-based non-single-crystal film used as thesemiconductor layer 403 and a second In—Ga—Zn—O based non-single-crystalfilm used as the n⁺ layers 404 a and 404 b are deposited under differentconditions. For example, the flow rate ratio of oxygen gas to argon gasunder the deposition conditions of the first In—Ga—In—O-basednon-single-crystal film is higher than that under the depositionconditions of the second In—Ga—Zn—O-based non-single-crystal film.Specifically, the second In—Ga—Zn—O-based non-single-crystal film isdeposited in a rare gas (such as argon or helium) atmosphere (or anatmosphere containing an oxygen gas at 10% or less and an argon gas at90% or more), and the first In—Ga—Zn—O-based non-single-crystal film isdeposited in an oxygen-mixed atmosphere (the flow rate of an oxygen gasis higher than that of an argon gas).

For example, with use of an oxide semiconductor target containing In,Ga, and Zn (In₂O₃:Ga₂O₃:ZnO=1:1:1), which has a diameter of 8 inches,the first In—Ga—Zn—O-based non-single-crystal film used as thesemiconductor layer 403 is deposited in an argon atmosphere or an oxygenatmosphere at a distance between the substrate and the target of 170 mm,a pressure of 0.4 Pa, and a direct current (DC) power supply of 0.5 kW.Note that a pulsed direct current (DC) power supply is preferably usedto reduce dust and obtain a uniform distribution of film thickness. Thefirst In—Ga—Zn—O-based non-single-crystal film has a thickness of 5 nmto 200 nm.

On the other hand, the second oxide semiconductor film used as the n⁺layers 404 a and 404 b is deposited by sputtering with use of a targetof In₂O₃, Ga₂O₃, and ZnO (1:1:1), at room temperature and at a pressureof 0.4 Pa, a power of 500 W, and an argon gas flow rate of 40 sccm. AnIn—Ga—Zn—O-based non-single-crystal film including a crystal grainhaving a diameter of 1 nm to 10 nm is formed in some cases immediatelyafter deposition. It is said that the presence, density, and diameter ofa crystal grain can be controlled by adjusting the deposition conditionsof reactive sputtering as appropriate, such as the composition ratio ofa target, the deposition pressure (0.1 Pa to 2.0 Pa), the power (250 Wto 3000 W: 8 inches φ), or the temperature (room temperature to 100°C.). The diameter of the crystal grain is controlled within a range of 1nm to 10 nm. The second In—Ga—Zn—O-based non-single-crystal film has athickness of 5 nm to 20 nm. It is needless to say that the diameter ofthe crystal grain included in the film does not exceed the thickness ofthe film. In this embodiment, the second In—Ga—Zn—O-basednon-single-crystal film has a thickness of 5 nm.

Examples of sputtering include an RF sputtering in which ahigh-frequency power source is used for a sputtering power source, a DCsputtering, and a pulsed DC sputtering in which a bias is applied in apulsed manner. The RF sputtering is mainly used for depositing aninsulating film, and the DC sputtering is mainly used for depositing ametal film.

Furthermore, there is also a multi-source sputtering apparatus in whicha plurality of targets of different materials can be set. With themulti-source sputtering apparatus, films of different materials can bedeposited to be stacked in the same chamber, or plural kinds ofmaterials can be deposited by electric discharge at the same time in thesame chamber

There are also a sputtering apparatus provided with a magnet systeminside the chamber and used for a magnetron sputtering, and a sputteringapparatus used for an ECR sputtering in which plasma generated with useof microwaves is used without using glow discharge.

As a deposition method by sputtering, there are also a reactivesputtering in which a target substance and a sputtering gas componentare chemically reacted with each other during deposition to form a thincompound film thereof, and a bias sputtering in which voltage is alsoapplied to a substrate during deposition.

In the manufacturing process of the semiconductor layer, the n⁺ layers,and the wiring layers, a thin film is processed into a desired shape byan etching step. For the etching step, dry etching or wet etching can beperformed.

As the etching gas used for dry etching, a gas containing chlorine(chlorine-based gas such as chlorine (Cl₂), boron chloride (BCl₃),silicon chloride (SiCl₄), or carbon tetrachloride (CCl₄)) is preferablyused.

Alternatively, a gas containing fluorine (fluorine-based gas such ascarbon tetrafluoride (CF₄), sulfur fluoride (SF₆), nitrogen fluoride(NF₃), or trifluoromethane (CHF₃)); hydrogen bromide (HBr); oxygen (O₂);any of these gases to which a rare gas such as helium (He) or argon (Ar)is added; or the like can be used.

Examples of the etching apparatus used for dry etching include anetching apparatus using a reactive ion etching method (an RIE method),or a dry etching apparatus using a high-density plasma source such asECR (electron cyclotron resonance) or ICP (inductively coupled plasma).As a dry etching apparatus by which uniform electric discharge can beobtained over a wider area as compared to an ICP etching apparatus,there is an ECCP (enhanced capacitively coupled plasma) mode etchingapparatus. An upper electrode of the ECCP mode etching apparatus isgrounded, and a lower electrode thereof is connected to a high-frequencypower source of 13.56 MHz and further to a low-frequency power source of3.2 MHz. This ECCP mode etching apparatus can be applied to, forexample, a substrate with a size exceeding 3 m of the tenth generation.

The etching conditions (e.g., the amount of electric power applied to acoiled electrode, the amount of electric power applied to an electrodeon the substrate side, and the electrode temperature on the substrateside) are adjusted as appropriate so as to process a film into a desiredshape.

Wet etching can be performed using a mixed solution of phosphoric acid,acetic acid, and nitric acid, or an ammonia hydrogen peroxide mixture(hydrogen peroxide:ammonia:water=5:2:2). Alternatively, ITO07N (producedby KANTO CHEMICAL CO., INC.) may be used.

An etchant used in wet etching is removed by cleaning together withmaterials which are etched away. Waste liquid of the etchant containingthe removed materials may be purified to recycle the materials containedin the waste liquid. When the materials such as indium contained in theoxide semiconductor layer are collected from the waste liquid afteretching and then recycled, resources can be effectively used and costcan be reduced.

The etching conditions (e.g., an etchant, etching time, and temperature)are adjusted as appropriate depending on the material so as to process afilm into a desired shape.

The wiring layers 405 a and 405 b can be made of an element selectedfrom Al, Cr, Ta, Ti, Mo, and W, an alloy containing any of theseelements as its component, an alloy containing a combination of any ofthese elements, and the like. If heat treatment at 200° C. to 600° C. isperformed, the conductive film preferably has heat resistance enough towithstand the heat treatment. Since aluminum alone has the disadvantagesof low heat resistance, being easily corroded, and the like, it is usedin combination with a conductive material having heat resistance. As theconductive material having heat resistance which is combined withaluminum, it is possible to use an element selected from titanium (Ti),tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), neodymium(Nd), and scandium (Sc), an alloy containing any of these elements asits component, an alloy containing a combination of any of theseelements, or a nitride containing any of these elements as itscomponent.

The insulating layer 402, the semiconductor layer 403, the n⁺ layers 404a and 404 b, and the wiring layers 405 a and 405 b may be successivelyformed without being exposed to air. Successive formation of the layerswithout exposure to air makes it possible to form each interface betweenthe stacked layers without being contaminated with atmosphericcomponents or impurity elements contained in air. Thus, variations incharacteristics of the thin film transistor can be reduced.

Note that the semiconductor layer 403 is partly etched so as to have agroove (a depressed portion).

The semiconductor layer 403 and the n⁺ layers 404 a and 404 b arepreferably subjected to heat treatment at 200° C. to 600° C., typically300° C. to 500° C. For example, heat treatment at 350° C. for one houris performed in a nitrogen atmosphere. This heat treatment involves therearrangement at the atomic level of the In—Ga—Zn—O-based oxidesemiconductor included in the semiconductor layer 403 and the n⁺ layers404 a and 404 b. This heat treatment (including light annealing) isimportant because the strain that inhibits the movement of carriers inthe semiconductor layer 403 and the n⁺ layers 404 a and 404 b can bereleased. Note that there is no particular limitation on the timing ofthe heat treatment, and the heat treatment may be performed at any timeafter the formation of the semiconductor layer 403 and the n⁺ layers 404a and 404 b.

In addition, the exposed depressed portion of the semiconductor layer403 may be subjected to oxygen radical treatment. The radical treatmentis preferably performed in an atmosphere of O₂ or N₂O, or an atmosphereof N₂, He, Ar, or the like which contains oxygen. The radical treatmentmay also be performed in an atmosphere in which Cl₂ and/or CF₄ is/areadded to the above atmosphere. Note that the radical treatment ispreferably performed with no bias voltage applied to the first substrate441 side.

There is no particular limitation on the structure of the thin filmtransistor formed in the liquid crystal display device. The transistormay have a single-gate structure including one channel formation region,a double-gate structure including two channel formation regions, or atriple-gate structure including three channel formation regions.Furthermore, a transistor in the peripheral driver circuit region mayalso have a single-gate structure, a double-gate structure, or atriple-gate structure.

The thin film transistor may have a top-gate structure (e.g., astaggered structure or a coplanar structure), a bottom-gate structure(e.g., an inverted-staggered structure or an inverted-coplanarstructure), a dual-gate structure including two gate electrode layersprovided over and under a channel region each with a gate insulatingfilm interposed therebetween, or other structures.

In this embodiment, a field-sequential liquid crystal display device,which displays moving images with high quality, can be obtained by usingthe liquid crystal layer exhibiting a blue phase with a sufficientlyshort response time and further using the thin film transistor includingthe In—Ga—Zn—O-based oxide semiconductor as a switching element.

Note that the shape of the pixel electrode layer and the commonelectrode layer formed over the structure body reflects the shape of thestructure body and is also influenced by an etching process. The shapeof the top surface of the structure body and the pixel electrode formedover the structure body is not limited to that illustrated in FIG. 2A,and may be a variety of shapes.

FIG. 3 illustrates another example of a plan view of a liquid crystaldisplay device. Note that description will be made using the samereference numerals for the portions that are common to those in FIG. 2A.

In FIG. 3, the first structure body 433 a, the second structure body 433b, the fourth structure body 433 d, and the fifth structure body 433 ehave the same shape and arrangement as those in FIG. 2A. A sixthstructure body 433 f adjacent to the second structure body 433 b has aV-shaped top surface. A seventh structure body 433 g adjacent to thesixth structure body 433 f has the same top shape as the first structurebody 433 a, but has a long-axis direction to the gate wiring layer whichis different from that of the first structure body 433 a. The long axisof the top surface of the eighth structure body 433 h is in the samedirection as, but shorter than that of the seventh structure body 433 g.Furthermore, in accordance with these structure bodies, openings in thesecond electrode layer 456 have a shape different from that of theopenings in the second electrode layer 446.

As described above, in FIG. 3, the sixth structure body 433 f, theseventh structure body 433 g, the eight structure body 433 h, and thesecond electrode layer 456 allow increasing the viewing angle ascompared to in FIG. 2A.

In FIG. 3, the top surface of the first electrode layer 457 is alsodifferent from that of the first electrode layer 447 in FIG. 2A. The topsurface of the first electrode layer 457 does not overlap the wiringlayer 405 a, and is electrically connected to a first electrode layer inan adjacent pixel through a capacitor wiring 410. In a liquid crystaldisplay device having a large display area, it is preferable to use thecapacitor wiring 410 made of a metal wiring with a lower resistance thanthe first electrode layer in order to reduce the wiring resistance.

In FIG. 3, electrical connection between the thin film transistor 420and the second electrode layer 456 is made through a contact hole 455.Although not illustrated, the contact hole is formed in the insulatingfilm 407 that is provided over the structure bodies and the firstelectrode layer 457. In that case, the first electrode layer 457 isinsulated from the second electrode layer 456 by a stack of theinsulating layer 402 and the insulating film 407.

As illustrated in FIG. 3, the structure bodies, the first electrodelayer, and the second electrode layer can have a variety of shapes.

(Embodiment 3)

In Embodiment 1, the calculation was performed with a voltage applied tothe first electrode layer set to 0 V and a voltage applied to the secondelectrode layer set to 10V. In this embodiment, calculation is performedwith a voltage applied to the first electrode layer set to 10 V and avoltage applied to the second electrode layer set to 0 V in FIG. 9A. Theresult of calculating the electric field applied in the liquid crystaldisplay device is shown in FIG. 9B.

In FIG. 9B, a solid line represents an equipotential line marked atintervals of 0.5 V, and the arrangement of the pixel electrode and thecommon electrode corresponds to that illustrated in FIG. 9A.

Since an electric field is applied perpendicularly to the equipotentialline, it is found that a horizontal electric field is applied betweenthe first pixel electrode layer and the second electrode layer asillustrated in FIG. 9B.

FIG. 9A is identical to FIG. 6A; therefore, description of FIG. 9A isomitted.

In the case where the electric field illustrated in FIG. 9B is appliedin an active matrix liquid crystal display device, the second electrodelayer is electrically connected to a thin film transistor.

An example of the cross-sectional structure in that case will beillustrated in FIG. 4. Note that description will be made using the samereference numerals for the portions that are common to those in FIG. 2B.

The thin film transistor 420 has the same structure as that in FIG. 2B.The first structure body 433 a, the second structure body 433 b, and thethird structure body 433 c are formed over a second insulating layer 465that is in contact with the semiconductor layer 403 of the thin filmtransistor 420. In the same process as these structure bodies, aninterlayer insulating film 413 is formed to overlap the thin filmtransistor 420.

A second electrode layer 466 is formed to cover the first structure body433 a, the second structure body 433 b, and the third structure body 433c. The second electrode layer 466 is electrically connected to thewiring layer 405 b of the thin film transistor 420 through a contacthole formed in the second insulating layer 465.

A third insulating layer 468 is formed to cover the second electrodelayer 466. This third insulating layer 468 corresponds to the insulatingfilm 407 in FIG. 2B.

A first electrode layer 467 is arranged over the third insulating layer468 to overlap the first structure body 433 a and the third structurebody 433 c. Note that the first electrode layer 467 has a fixedpotential and includes a plurality of openings (slits).

In this embodiment, a part of the pixel electrode which is provided onan inclined surface of the interlayer insulating film 413 also allows anelectric field in a direction parallel to the plane surface of the firstsubstrate 441 to be formed in the liquid crystal layer 444. An electricfield is formed between the part of the pixel electrode which isprovided on the inclined surface of the interlayer insulating film 413and a part of the first electrode layer 467 which is provided on aninclined surface of the first structure body 433 a.

This embodiment shows an example in which the interlayer insulating film413 and the plurality of structure bodies are formed in the same processin order to reduce the number of manufacturing steps; however, thepresent invention is not limited to this example and the plurality ofstructure bodies may be formed after the formation of the interlayerinsulating film.

This embodiment can be freely combined with Embodiment 1 or Embodiment2.

(Embodiment 4)

In this embodiment, a structure for applying a strong electric field toa liquid crystal layer will be described in which a third electrodelayer is provided on the second substrate in addition to the structureof Embodiment 1.

FIG. 5A is a diagram illustrating an example of the positionalrelationship between a first electrode layer, a second electrode layer,and a third electrode layer in a liquid crystal display device. Notethat description will be made using the same reference numerals for theportions that are common to those in FIG. 1A.

In FIG. 5A, structure bodies formed over the first substrate 200, thefirst electrode layer, and the second electrode layer are arranged inthe same position as in FIG. 1A.

A third electrode 235 a and a third electrode 235 b which are formed onthe second substrate 201 are provided over the structure body 233 a andthe structure body 233 c, respectively.

For example, when a voltage is applied so that a potential difference isgenerated between the pixel electrode and the common electrode, ahorizontal electric field indicated by an arrow 202 g is applied betweenthe second electrode layer 230 a serving as the pixel electrode and thefirst electrode layer 232 serving as the common electrode. Furthermore,an oblique electric field indicated by an arrow 202 i is applied betweenthe second electrode layer 230 a and the third electrode layer 235 aserving as the common electrode. The oblique electric field indicated bythe arrow 202 i allows the response of liquid crystal molecules to bemade in the entire liquid crystal layer including the thicknessdirection.

In addition, a horizontal electric field indicated by an arrow 202 h isapplied between the second electrode layer 230 b and the first electrodelayer 232. Furthermore, an oblique electric field indicated by an arrow202 j is applied between the second electrode layer 230 b and the thirdelectrode layer 235 a serving as the common electrode. The obliqueelectric field indicated by the arrow 202 j allows the response ofliquid crystal molecules to be made in the entire liquid crystal layerincluding the thickness direction.

FIG. 10B shows the result of calculating the electric field applied inthe liquid crystal display device including the third electrode layer235 a. FIG. 10A is a diagram illustrating the structure of the liquidcrystal display device used for calculation.

The cross section of the third electrode layer 235 a serving as thecommon electrode has a width of 1.60 μm and a thickness of 0.25 μm. Notethat a voltage applied to the first electrode layer 232 serving as thecommon electrode and a voltage applied to the third electrode layer 235a are set to 0 V, and a voltage applied to the second electrode layerserving as the pixel electrode is set to 10 V.

FIG. 5A illustrates an example in which the second electrode layer 230 aserves as the pixel electrode and the first electrode layer 232 servesas the common electrode. On the other hand, FIG. 5B illustrates anexample in which the second electrode layer 230 a serves as the commonelectrode and the first electrode layer 232 serves as the pixelelectrode.

In the case of FIG. 5B, a third electrode layer 235 c, a third electrodelayer 235 d, a third electrode layer 235 e which are formed on thesecond substrate 201 are respectively provided over the second electrodelayer 230 a, the second electrode layer 230 b, and the second electrodelayer 230 c serving as the common electrodes.

For example, when a voltage is applied so that a potential difference isgenerated between the pixel electrode and the common electrode, in FIG.5B, a horizontal electric field indicated by an arrow 202 w is appliedbetween the second electrode layer 230 a serving as the common electrodeand the first electrode layer 232 serving as the pixel electrode.Furthermore, an oblique electric field indicated by an arrow 202 y isapplied between the first electrode layer 232 and the third electrodelayer 235 c serving as the common electrode. The oblique electric fieldindicated by the arrow 202 y allows the response of liquid crystalmolecules to be made in the entire liquid crystal layer including thethickness direction.

In addition, a horizontal electric field indicated by an arrow 202 x isapplied between the second electrode layer 230 b and the first electrodelayer 232. Furthermore, an oblique electric field indicated by an arrow202 z is applied between the first electrode layer 232 and the thirdelectrode layer 235 d serving as the common electrode. The obliqueelectric field indicated by the arrow 202 z allows the response ofliquid crystal molecules to be made in the entire liquid crystal layerincluding the thickness direction.

FIG. 11B shows the result of calculating the electric field applied inthe liquid crystal display device including the third electrode layers235 c and 235 d. FIG. 11A is a diagram illustrating the structure of theliquid crystal display device used for calculation. Note that a voltageapplied to the second electrode layers 230 a and 230 b serving as thecommon electrodes and a voltage applied to the third electrode layers235 c and 235 d are set to 0 V, and a voltage applied to the firstelectrode layer 232 serving as the pixel electrode is set to 10 V.

The cross section of each of the third electrode layers 235 c and 235 dhas a width of 2.40 μm and a thickness of 0.25 μm.

This embodiment can be freely combined with Embodiment 1, Embodiment 2,or Embodiment 3.

(Embodiment 5)

In this embodiment, a block diagram of a liquid crystal display deviceis illustrated in FIGS. 12A and 12B. FIG. 12A illustrates a structure ofa display portion 1301 and a driving portion 1302. The driving portion1302 includes a signal line driver circuit 1303, a scan line drivercircuit 1304, and the like. In the display portion 1301, a plurality ofpixels 1305 are provided in a matrix.

In FIG. 12A, a scan signal is supplied from the scan line driver circuit1304 to a scan line 1306, and data is supplied from the signal linedriver circuit 1303 to a signal line 1308. A scan signal is suppliedfrom the scan line 1306 so that the pixels 1305 are selected in orderfrom the first row of the scan line 1306.

In FIG. 12A, the scan line driver circuit 1304 is connected to n scanlines 1306 G₁ to G_(n). Considering the case where the minimum imageunit is composed of three pixels of R (red), G (green), and B (blue),the signal line driver circuit 1303 is connected to 3m signal lines intotal: m signal lines S_(R1) to S_(Rm) corresponding to R; m signallines S_(G1) to S_(Gm) corresponding to G, and m signal lines S_(B1) toS_(Bm) corresponding to B. That is, as illustrated in FIG. 12B, eachcolor element is provided with a signal line and data is supplied fromthe signal line to the pixel corresponding to each color element, sothat the pixels 1305 can express a desired color.

A timing chart of FIG. 13 shows scan signals for selecting the scanlines 1306 (e.g., G1 and Gn) in the respective row-selection periods(scan period of one row of pixels of the display device) in one frameperiod, and a data signal of the signal line 1308 (e.g., SR1).

Note that the circuit diagram of FIG. 12A is based on the assumptionthat an n-channel transistor is included in each pixel. Also in FIG. 13,description is made on the driving of a pixel in the case of controllingon or off of an n-channel transistor. If a p-channel transistor is usedin the circuit diagram of FIG. 12A, the potential of the scan signalonly needs to be changed so that the transistor can be turned on or offin a manner similar to that in the case of using an n-channeltransistor.

In the timing chart of FIG. 13, a row-selection period is 1/(120×n)second on the assumption that one frame period during which an image ofone screen is displayed is set to at least 1/120 second (≈8.3 ms) (morepreferably, 1/240 second) and the number of scan lines is set to n sothat an afterimage is not visible to an observer. In the case of adisplay device including 2000 scan lines (considering so-called 4k2kimages with 4096×2160 pixels, 3840×2160 pixels, or the like), arow-selection period is 1/240000 second (≈4.2 μs) if signal delay or thelike due to a wiring is not taken into consideration.

A blue-phase liquid crystal element has a response time (a time tochange the alignment of a liquid crystal molecule) of 1 ms or less whena voltage is applied. On the other hand, a VA mode liquid crystalelement has a response time of about a few milliseconds when a voltageis applied, even if the overdrive method is employed. Accordingly, inthe operation of a VA mode liquid crystal element, the length of oneframe period needs to be longer than the response time in order tomaintain high image quality. In the display device of this embodiment, ablue-phase liquid crystal element is used and a wiring is made of alow-resistant material such as Cu so as to reduce signal delay due tothe wiring, a wide margin of response time of the liquid crystal elementcan be provided, and a desired alignment of the liquid crystal elementwhich is based on a voltage applied to the liquid crystal element in arow-selection period can be efficiently obtained.

This embodiment can be freely combined with Embodiment 1, Embodiment 2,Embodiment 3, or Embodiment 4.

(Embodiment 6)

Another example of a thin film transistor that can be applied to theliquid crystal display device of Embodiments 1 to 4 will be described.In particular, description will be made on an example of the structureof a thin film transistor and the semiconductor material used for asemiconductor layer. Components in common with those in Embodiments 1 to4 can be formed using a similar material and manufacturing method, anddetailed description of the same portions or portions having similarfunctions is omitted.

FIG. 14 is a cross-sectional view of one mode of the thin filmtransistor shown in this embodiment. The thin film transistorillustrated in FIG. 14 includes a gate electrode layer 503 over asubstrate 501, a semiconductor layer 515 over a gate insulating layer505, impurity semiconductor layers 527 serving as source and drainregions which are in contact with the upper surface of the semiconductorlayer 515, and wirings 525 in contact with the impurity semiconductorlayers 527. The semiconductor layer 515 includes a microcrystallinesemiconductor layer 515 a, a mixed region 515 b, and a layer 529 ccontaining an amorphous semiconductor, which are stacked in order overthe gate insulating layer 505.

Next, a structure of the semiconductor layer 515 will be described.FIGS. 15A and 15B are enlarged views of the area between the gateinsulating layer 505 and the impurity semiconductor layers 527 servingas source and drain regions.

FIGS. 15A and 15B illustrate one mode of the semiconductor layer 515. Asillustrated in FIG. 15A, in the semiconductor layer 515, themicrocrystalline semiconductor layer 515 a, the mixed region 515 b, andthe layer 529 c containing an amorphous semiconductor are stacked.

A microcrystalline semiconductor included in the microcrystallinesemiconductor layer 515 a is a semiconductor having a crystal structure(including a single crystal and a polycrystal). The microcrystallinesemiconductor is a semiconductor in a third state that is stable interms of free energy, and is a crystalline semiconductor havingshort-range order and lattice distortion. The microcrystallinesemiconductor includes columnar or needle-like crystals with a grainsize of 2 nm to 200 nm, preferably 10 nm to 80 nm, and more preferably20 nm to 50 nm, which grow in the direction of the normal to the surfaceof the substrate. Therefore, a crystal grain boundary is formed at theinterface of the columnar or needle-like crystals in some cases.

The Raman spectrum of microcrystalline silicon, which is a typicalexample of a microcrystalline semiconductor, has a peak shifted to alower wavenumber side than 520 cm⁻¹ that represents single crystalsilicon. In other words, the Raman spectrum of microcrystalline siliconhas a peak between 520 cm⁻¹ that represents single crystal silicon and480 cm⁻¹ that represents amorphous silicon. Furthermore, themicrocrystalline semiconductor may contain 1 atomic % or more ofhydrogen or halogen to terminate dangling bonds. The microcrystallinesemiconductor may further contain a rare gas element such as helium,argon, krypton, or neon to further promote lattice distortion, wherebythe stability of the microcrystalline structure is improved and afavorable microcrystalline semiconductor can be obtained. Such amicrocrystalline semiconductor is disclosed in, for example, U.S. Pat.No. 4,409,134.

In order to improve the crystallinity of the microcrystallinesemiconductor layer 515 a, the concentrations of oxygen and nitrogencontained in the microcrystalline semiconductor layer 515 a which aremeasured by secondary ion mass spectrometry are preferably set to lessthan 1×10¹⁸ atoms/cm³.

The microcrystalline semiconductor layer 515 a preferably has athickness of 3 nm to 100 nm, more preferably 5 nm to 50 nm.

Although the microcrystalline semiconductor layer 515 a is formed as alayer in FIG. 14 and FIGS. 15A and 15B, microcrystalline semiconductorparticles may be dispersed on the gate insulating layer 505 instead. Inthat case, the mixed region 515 b is in contact with themicrocrystalline semiconductor particles and the gate insulating layer505.

When the microcrystalline semiconductor particles have a size of 1 nm to30 nm, and a density of less than 1×10¹³/cm², preferably 1×10¹⁰/cm², themicrocrystalline semiconductor particles can be separated from eachother.

The mixed region 515 b and the layer 529 c containing an amorphoussemiconductor contain nitrogen. The concentration of nitrogen containedin the mixed region 515 b is 1×10²⁰ atoms/cm³ to 1×10²¹ atoms/cm³,preferably 2×10²⁰ atoms/cm³ to 1×10²¹ atoms/cm³.

As illustrated in FIG. 15A, the mixed region 515 b includesmicrocrystalline semiconductor regions 508 a and an amorphoussemiconductor region 508 b which fills the space between themicrocrystalline semiconductor regions 508 a. Specifically, the mixedregion 515 b includes the microcrystalline semiconductor regions 508 agrowing into a projecting shape from the surface of the microcrystallinesemiconductor layer 515 a, and the amorphous semiconductor region 508 bmade of the same kind of semiconductor as the layer 529 c containing anamorphous semiconductor.

The microcrystalline semiconductor regions 508 a are made of amicrocrystalline semiconductor with a projecting, needle-like, conical,or pyramidal shape which is tapered from the gate insulating layer 505toward the layer 529 c containing an amorphous semiconductor. Note thatthe microcrystalline semiconductor regions 508 a may be made of amicrocrystalline semiconductor with a projecting, conical, or pyramidalshape which is tapered from the layer 529 c containing an amorphoussemiconductor toward the gate insulating layer 505.

In some cases, the amorphous semiconductor region 508 b in the mixedregion 515 b includes a semiconductor crystal grain with a size of 1 nmto 10 nm, preferably 1 nm to 5 nm as a microcrystalline semiconductorregion.

Alternatively, as illustrated in FIG. 15B, a microcrystallinesemiconductor region 508 c with a uniform thickness which is depositedover the microcrystalline semiconductor layer 515 a, and themicrocrystalline semiconductor region 508 a with a projecting,needle-like, conical, or pyramidal shape which is tapered from the gateinsulating layer 505 toward the layer 529 c containing an amorphoussemiconductor are successively formed in the mixed region 515 b.

The amorphous semiconductor region 508 b included in the mixed region515 b illustrated in FIGS. 15A and 15B is made of a semiconductor havingsubstantially the same quality as that in the layer 529 c containing anamorphous semiconductor.

Accordingly, it is said that the interface between a region including amicrocrystalline semiconductor and a region including an amorphoussemiconductor corresponds to the interface between the microcrystallinesemiconductor region 508 a and the amorphous semiconductor region 508 bin the mixed region; thus, a cross-sectional boundary between themicrocrystalline semiconductor region and the amorphous semiconductorregion can be described as uneven or zigzag.

In the mixed region 515 b, in the case where the microcrystallinesemiconductor region 508 a includes a semiconductor crystal grain with aprojecting shape which is tapered from the gate insulating layer 505toward the layer 529 c containing an amorphous semiconductor, theproportion of the microcrystalline semiconductor region is higher in aregion closer to the microcrystalline semiconductor layer 515 a than ina region closer to the layer 529 c containing an amorphoussemiconductor. The reason for this is as follows. The microcrystallinesemiconductor region 508 a grows in the thickness direction from thesurface of the microcrystalline semiconductor layer 515 a. By adding agas containing nitrogen to a source gas, or by adding a gas containingnitrogen to a source gas and reducing the flow rate of hydrogen tosilane from that under the condition for depositing the microcrystallinesemiconductor layer 515 a, growth of the semiconductor crystal grain inthe microcrystalline semiconductor region 508 a is suppressed to form aconical or pyramidal microcrystalline semiconductor region, and theamorphous semiconductor is gradually deposited thereover. This is causedby the fact that the solid solubility of nitrogen in themicrocrystalline semiconductor region is lower than that in theamorphous semiconductor region.

The total thickness of the microcrystalline semiconductor layer 515 aand the mixed region 515 b, that is, the distance from the interfacebetween the microcrystalline semiconductor layer 515 a and the gateinsulating layer 505 to the tip of the projection (projecting portion)in the mixed region 515 b is set to 3 nm to 410 nm, preferably 20 nm to100 nm, so that the off-current of the thin film transistor can bereduced.

The layer 529 c containing an amorphous semiconductor is made of asemiconductor having substantially the same quality as that in theamorphous semiconductor region 508 b included in the mixed region 515 b,and contains nitrogen. In some cases, the layer 529 c containing anamorphous semiconductor includes a semiconductor crystal grain with asize of 1 nm to 10 nm, preferably 1 nm to 5 nm. Here, the layer 529 ccontaining an amorphous semiconductor means a semiconductor layer havinglow energy at an Urbach edge and a narrow spectrum of defect absorption,which are measured by a constant photocurrent method (CPM) orphotoluminescence spectroscopy, compared to a conventional amorphoussemiconductor layer. In other words, the layer 529 c containing anamorphous semiconductor is a well-ordered semiconductor layer which hasfewer defects and a steep tail slope of a level at a band edge in thevalence band compared to the conventional amorphous semiconductor layer.Since the layer 529 c containing an amorphous semiconductor has a steeptail slope of a level at a band edge in the valence band, the band gapincreases, and tunneling current does not easily flow. Therefore, thelayer 529 c containing an amorphous semiconductor provided on the backchannel side allows reducing the off-current of the thin filmtransistor. In addition, the layer 529 c containing an amorphoussemiconductor allows increasing the on-current and field-effect mobilityof the thin film transistor.

The spectrum of the layer 529 c containing an amorphous semiconductor,which is measured using low-temperature photoluminescence spectroscopy,has a peak in the range of 1.31 eV to 1.39 eV. Note that the spectrum ofa microcrystalline semiconductor layer, typically a microcrystallinesilicon layer, which is measured using low-temperature photoluminescencespectroscopy, has a peak in the range of 0.98 eV to 1.02 eV, which meansthat the layer 529 c containing an amorphous semiconductor is differentfrom the microcrystalline semiconductor layer.

Amorphous silicon is a typical example of an amorphous semiconductor inthe layer 529 c containing an amorphous semiconductor.

It is preferable that the mixed region 515 b and the layer 529 ccontaining an amorphous semiconductor each have a thickness of 50 nm to350 nm, more preferably 120 nm to 250 nm.

Since the mixed region 515 b includes the conical or pyramidalmicrocrystalline semiconductor region 508 a, the resistance in thevertical direction (the thickness direction) in applying voltage to asource or drain electrode, that is, the resistance of themicrocrystalline semiconductor layer 515 a, the mixed region 515 b, andthe layer 529 c containing an amorphous semiconductor can be reduced.

The mixed region 515 b preferably has an NH group or an NH₂ group. Thisis because the NH group or the NH₂ group is bonded to a dangling bond ofa silicon atom at the interface between different microcrystallinesemiconductor regions included in the microcrystalline semiconductorregion 508 a, at the interface between the microcrystallinesemiconductor region 508 a and the amorphous semiconductor region 508 b,or at the interface between the microcrystalline semiconductor layer 515a and the mixed region 515 b, whereby defects are reduced.

Further, making the oxygen concentration lower than the nitrogenconcentration in the mixed region 515 b allows reducing bonds whichinterrupt carrier transfer at the interface between the microcrystallinesemiconductor region 508 a and the amorphous semiconductor region 508 band in defects at the interface between semiconductor crystal grains.

In this manner, the off-current of the thin film transistor can bereduced by forming a channel formation region using the microcrystallinesemiconductor layer 515 a, and by providing, between the channelformation region and the impurity semiconductor layers 527 serving assource and drain regions, the layer 529 c containing an amorphoussemiconductor, which is a well-ordered semiconductor layer having fewerdefects and a steep tail slope of a level at a band edge in the valenceband. In addition, the off-current of the thin film transistor can bereduced while the on-current and field-effect mobility thereof isincreased by providing, between the channel formation region and theimpurity semiconductor layers 527 serving as source and drain regions,the mixed region 515 b including the conical or pyramidalmicrocrystalline semiconductor region 508 a, and the layer 529 ccontaining an amorphous semiconductor, which is a well-orderedsemiconductor layer having fewer defects and a steep tail slope of alevel at a band edge in the valence band.

The impurity semiconductor layers 527 illustrated in FIG. 14 are formedof amorphous silicon to which phosphorus is added, microcrystallinesilicon to which phosphorus is added, or the like. In the case where ap-channel thin film transistor is formed as the thin film transistor,the impurity semiconductor layers 527 are formed of microcrystallinesilicon to which boron is added, amorphous silicon to which boron isadded, or the like. Note that the impurity semiconductor layers 527 arenot necessarily formed in the case where an ohmic contact is formedbetween the mixed region 515 b or the layer 529 c containing anamorphous semiconductor and the wirings 525.

The off-current of the thin film transistor illustrated in FIG. 14 andFIGS. 15A and 15B can be reduced while the on-current and field-effectmobility thereof is increased by forming the channel formation regionusing the microcrystalline semiconductor layer and providing the layercontaining an amorphous semiconductor on the back channel side.Furthermore, since the channel formation region is formed using themicrocrystalline semiconductor layer, the thin film transistor lessdeteriorates and has high reliability in electric characteristics.

This embodiment can be implemented in appropriate combination with thestructures shown in the other embodiments.

(Embodiment 7)

The liquid crystal display device shown in any one of Embodiments 1 to 6includes thin film transistors, and when the thin film transistors areused for a driver circuit and further a pixel portion, the liquidcrystal display device can have a display function. In addition, whenpart or whole of the driver circuit is formed over the same substrate asthe pixel portion with use of the thin film transistors, asystem-on-panel can be obtained.

The liquid crystal display device includes a liquid crystal element(also referred to as a liquid crystal display element) as a displayelement.

Furthermore, the liquid crystal display device includes a panel in whichthe display element is sealed, and a module in which an IC or the likeincluding a controller is mounted on the panel. An embodiment of thepresent invention also relates to an element substrate, whichcorresponds to one mode before the display element is completed in amanufacturing process of the liquid crystal display device, and theelement substrate is provided with means for supplying current to thedisplay element in each of a plurality of pixels. Specifically, theelement substrate may be in a state after only a pixel electrode of thedisplay element is formed, a state after a conductive film to be a pixelelectrode is formed and before the conductive film is etched to form thepixel electrode, or any other state.

Note that a liquid crystal display device in this specification refersto an image display device, a display device, or a light source(including a lighting device). Furthermore, the liquid crystal displaydevice also includes the following modules in its category: a module towhich a connector such as a flexible printed circuit (FPC), a tapeautomated bonding (TAB) tape, or a tape carrier package (TCP) isattached; a module having a TAB tape or a TCP at the tip of which aprinted wiring board is provided; and a module in which an integratedcircuit (IC) is directly mounted on a display element by chip on glass(COG).

The appearance and cross section of a liquid crystal display panel,which is one embodiment of the liquid crystal display device, will bedescribed with reference to FIGS. 16A and 16B. FIGS. 16A and 16B are topviews of a panel in which thin film transistors 4010 and 4011, and aliquid crystal element 4013 are sealed between a first substrate 4001and a second substrate 4006 with a sealant 4005. FIG. 16B is across-sectional view taken along line M-N of FIGS. 16A1 and 16A2.

The sealant 4005 is provided to surround a pixel portion 4002 and ascanning line driver circuit 4004 that are provided over the firstsubstrate 4001. The second substrate 4006 is provided over the pixelportion 4002 and the scanning line driver circuit 4004. Therefore, thepixel portion 4002 and the scanning line driver circuit 4004 are sealedtogether with a liquid crystal layer 4008, by the first substrate 4001,the sealant 4005, and the second substrate 4006.

In FIG. 16A1, a signal line driver circuit 4003 that is formed using asingle crystal semiconductor film or a polycrystalline semiconductorfilm over a substrate separately prepared is mounted in a regiondifferent from the region surrounded by the sealant 4005 over the firstsubstrate 4001. FIG. 16A2 illustrates an example in which part of asignal line driver circuit is formed over the first substrate 4001 withuse of a thin film transistor. A signal line driver circuit 4003 b isformed over the first substrate 4001 and a signal line driver circuit4003 a that is formed using a single crystal semiconductor film or apolycrystalline semiconductor film is mounted on a substrate separatelyprepared.

Note that there is no particular limitation on the connection method ofa driver circuit which is separately formed, and COG, wire bonding, TAB,or the like can be used. FIG. 16A1 illustrates an example of mountingthe signal line driver circuit 4003 by COG, and FIG. 16A2 illustrates anexample of mounting the signal line driver circuit 4003 by TAB.

In FIGS. 16A1, 16A2, and 16B, a connecting terminal electrode 4015 isformed using the same conductive film as that for the pixel electrodelayer 4030, and a terminal electrode 4016 is formed using the sameconductive film as that for source and drain electrode layers of thethin film transistors 4010 and 4011. The connecting terminal electrode4015 is electrically connected to a terminal included in the FPC 4018through an anisotropic conductive film 4019.

The pixel portion 4002 and the scanning line driver circuit 4004provided over the first substrate 4001 each include a plurality of thinfilm transistors. FIG. 16B illustrates the thin film transistor 4010included in the pixel portion 4002 and the thin film transistor 4011included in the scanning line driver circuit 4004. Insulating layers4020 and 4021 are provided over the thin film transistors 4010 and 4011.

The thin film transistor shown in Embodiment 3 is used as the thin filmtransistors 4010 and 4011. Alternatively, the thin film transistor shownin Embodiment 6, which includes a microcrystalline semiconductor layeras the semiconductor layer, may be used as the thin film transistors4010 and 4011. The thin film transistors 4010 and 4011 are n-channelthin film transistors.

The pixel electrode layer 4030 and a common electrode layer 4031 areprovided over the first substrate 4001.

As in Embodiment 3, a plurality of structure bodies are formed in thesame process as the insulating layer 4021. The pixel electrode layer4030 is formed on an inclined surface of a first structure body 4022,and an insulating layer 4023 and the common electrode layer 4031 arestacked thereover. Further, the pixel electrode layer 4030 and theinsulating layer 4023 are stacked over a second structure body 4024adjacent to the first structure body 4022.

The pixel electrode layer 4030 is electrically connected to the thinfilm transistor 4010 through a contact hole formed in the insulatinglayer 4020. A liquid crystal element 4013 includes the common electrodelayer 4031 provided on the inclined surface of the first structure body4022, the pixel electrode layer 4030 provided on the inclined surface ofthe second structure body 4024, and a liquid crystal layer 4008interposed therebetween.

A polarizing plate 4032 and a polarizing plate 4033 are provided on theoutside of the first substrate 4001 and the second substrate 4006,respectively.

The first substrate 4001 and the second substrate 4006 may be made ofglass, plastic, or the like having light-transmitting properties. Aplastic substrate may be a fiberglass-reinforced plastics (FRP) plate, apolyvinyl fluoride (PVF) film, a polyester film, or an acrylic resinfilm. Alternatively, a sheet with a structure in which an aluminum foilis sandwiched between PVF films or polyester films can be used.

Reference numeral 4035 denotes a columnar spacer obtained by selectivelyetching an insulating film and is provided to control the thickness ofthe liquid crystal layer 4008 (a cell gap). Alternatively, a sphericalspacer may be used. In the liquid crystal display device using theliquid crystal layer 4008, the liquid crystal layer 4008 preferably hasa thickness (a cell gap) of about 5 μm to 20 μm.

Although FIGS. 16A and 16B illustrate examples of a transmissive liquidcrystal display device, an embodiment of the present invention can alsobe applied to a transflective liquid crystal display device.

FIGS. 16A and 16B illustrate an example of the liquid crystal displaydevice in which the polarizing plate is provided on the outside of thesubstrate (on the viewer side); however, the polarizing plate may beprovided on the inside of the substrate. The polarizing plate may beprovided inside or outside the substrate as appropriate depending onmaterials of the polarizing plate or conditions of manufacturing steps.Furthermore, a light-shielding layer serving as a black matrix may beprovided.

The insulating layer 4021 is a resin layer. In FIGS. 16A and 16B, alight-shielding layer 4034 is provided on the second substrate 4006 sideso as to cover the thin film transistors 4010 and 4011. Thelight-shielding layer 4034 allows improving the contrast andstabilization of the thin film transistors.

FIG. 17 illustrates an example of a cross-sectional structure of aliquid crystal display device, in which an element substrate 2600 and acounter substrate 2601 are bonded to each other with a sealant 2602, andan element layer 2603 including a TFT or the like and a liquid crystallayer 2604 are provided between the substrates.

In the case of performing color display, light-emitting diodes whichemit light of plural colors are disposed in a backlight portion. In thecase of an RGB mode, a red light-emitting diode 2910R, a greenlight-emitting diode 2910G, and a blue light-emitting diode 2910B aredisposed in each of the regions into which a display area of the liquidcrystal display device is divided.

A polarizing plate 2606 is provided on the outside of the countersubstrate 2601, and a polarizing plate 2607 and an optical sheet 2613are provided on the outside of the element substrate 2600. A lightsource includes the red light-emitting diode 2910R, the greenlight-emitting diode 2910G, the blue light-emitting diode 2910B, and areflective plate 2611. An LED control circuit 2912 provided for acircuit substrate 2612 is connected to a wiring circuit portion 2608 ofthe element substrate 2600 through a flexible wiring board 2609 andfurther includes an external circuit such as a control circuit or apower source circuit.

This embodiment shows an example of a field-sequential liquid crystaldisplay device in which the LEDs are individually made to emit light bythis LED control circuit 2912; however, the present invention is notparticularly limited to this example. A cold cathode fluorescent lamp ora white LED may be used as a light source of the backlight and a colorfilter may be provided.

This embodiment can be implemented in appropriate combination with thestructures shown in the other embodiments.

(Embodiment 8)

A liquid crystal display device manufactured in any of the steps shownin Embodiments 1 to 6 can be applied to a variety of electronicappliances (including an amusement machine). Examples of electronicappliances include a television set (also referred to as a television ora television receiver), a monitor of a computer or the like, a camerasuch as a digital camera or a digital video camera, a digital photoframe, a cellular phone (also referred to as a mobile phone or a mobilephone set), a portable game console, a portable information terminal, anaudio reproducing device, and a large-sized game machine such as apachinko machine.

FIG. 18A illustrates an example of a television set 9600. In thetelevision set 9600, a display portion 9603 is incorporated in a housing9601. Images can be displayed on the display portion 9703. In FIG. 18A,the rear side of the housing is fixed to and supported by the wall.

The television set 9600 can be operated with an operation switch of thehousing 9601 or a separate remote controller 9610. Channels and volumecan be controlled by an operation key 9609 of the remote controller 9610so that an image displayed on the display portion 9603 can becontrolled. Furthermore, the remote controller 9610 may be provided witha display portion 9607 for displaying information output from the remotecontroller 9610.

Note that the television set 9600 is provided with a receiver, a modem,and the like. With the receiver, a general television broadcast can bereceived. Furthermore, when the television set 9600 is connected to acommunication network by wired or wireless connection via the modem,one-way (from a transmitter to a receiver) or two-way (between atransmitter and a receiver, between receivers, or the like) datacommunication can be performed.

FIG. 18B is a portable amusement machine including two housings, ahousing 9881 and a housing 9891. The housings 9881 and 9891 areconnected with a connection portion 9893 so as to be opened and closed.A display portion 9882 and a display portion 9883 are incorporated inthe housing 9881 and the housing 9891, respectively. In addition, theportable amusement machine illustrated in FIG. 18B includes a speakerportion 9884, a recording medium insertion portion 9886, an LED lamp9890, an input means (an operation key 9885, a connection terminal 9887,a sensor 9888 (a sensor having a function of measuring force,displacement, position, speed, acceleration, angular velocity,rotational frequency, distance, light, liquid, magnetism, temperature,chemical substance, sound, time, hardness, electric field, current,voltage, electric power, radiation, flow rate, humidity, gradient,oscillation, odor, or infrared rays), or a microphone 9889), and thelike. It is needless to say that the structure of the portable amusementmachine is not limited to the above and other structures provided withat least a semiconductor device may be employed. The portable amusementmachine may include other accessory equipment as appropriate. Theportable amusement machine illustrated in FIG. 18B has a function ofreading a program or data stored in a recording medium to display it onthe display portion, and a function of sharing information with anotherportable amusement machine by wireless communication. The portableamusement machine illustrated in FIG. 18B can have various functionswithout limitation to the above.

FIG. 19A illustrates an example of a cellular phone 1000. The cellularphone 1000 includes a display portion 1002 incorporated in a housing1001, an operation button 1003, an external connection port 1004, aspeaker 1005, a microphone 1006, and the like.

Data can be input to the cellular phone 1000 illustrated in FIG. 19Awhen the display portion 1002 is touched with a finger or the like. Whenthe display portion 1002 is touched with a finger or the like,operations such as making calls and composing mails can also beperformed.

There are mainly three screen modes of the display portion 1002. Thefirst mode is a display mode mainly for displaying images, and thesecond mode is an input mode mainly for inputting data such as text. Thethird mode is a display-and-input mode in which the display mode and theinput mode are combined.

For example, in a case of making a call or composing a mail, a textinput mode mainly for inputting text is selected for the display portion1002 so that text displayed on a screen can be input. In that case, itis preferable to display a keyboard or number buttons on almost thewhole area of the screen of the display portion 1002.

When the cellular phone 1000 is provided with a detection deviceincluding a sensor for detecting inclination, such as a gyroscope or anacceleration sensor, display on the screen of the display portion 1002can be automatically switched by determining the installation directionof the cellular phone 1000 (whether the cellular phone 1000 is placedhorizontally or vertically for a landscape mode or a portrait mode).

The screen mode is switched by touching the display portion 1002 oroperating the operation button 1003 of the housing 1001. Alternatively,the screen mode may be switched depending on the kind of image displayedon the display portion 1002. For example, when an image signal displayedon the display portion is moving image data, the screen mode is switchedto the display mode. When the image signal is text data, the screen modeis switched to the input mode.

Furthermore, in the input mode, when input by touching the displayportion 1002 is not performed for a certain period while a signal isdetected by the optical sensor in the display portion 1002, the screenmode may be controlled so as to be switched from the input mode to thedisplay mode.

The display portion 1002 may function as an image sensor. For example,when an image of a palm print, a fingerprint, or the like is taken bytouching the display portion 1002 with the palm or the finger, personalauthentication can be performed. Further, when a backlight or a sensinglight source which emits a near-infrared light is used in the displayportion, an image of a finger vein, a palm vein, or the like can betaken.

FIG. 19B is a perspective view illustrating an example of an c-bookreader. The e-book reader of FIG. 19B includes a plurality of displaypanels. A third display panel with dual display is provided between afirst display panel 4311 and a second display panel 4312, and the e-bookreader is opened.

The e-book reader of FIG. 19B includes the first display panel 4311having a first display portion 4301, the second display panel 4312having an operation portion 4304 and a second display portion 4307, thethird display panel 4313 having a third display portion 4302 and afourth display portion 4310, and a binding portion 4308 provided in oneend portion of the first display panel 4311, the second display panel4312, and the third display panel 4313. The third display panel 4313 isinterposed between the first display panel 4311 and the second displaypanel 4312. The e-book reader of FIG. 19B includes four display screens:the first display portion 4301, the second display portion 4307, thethird display portion 4302, and the fourth display portion 4310.

The first display panel 4311, the second display panel 4312, and thethird display panel 4313 are flexible and easy to bend. When the firstdisplay panel 4311 and the second display panel 4312 are formed usingplastic substrates and the third display panel 4313 is formed using athin film, the e-book reader can be made thin.

The third display panel 4313 is a dual display panel having the thirddisplay portion 4302 and the fourth display portion 4310. Alternatively,two liquid crystal display panels between which a backlight (preferablya thin EL light-emitting panel) is interposed may be used for the thirddisplay panel 4313. Note that a liquid crystal display panel is notnecessarily used for all the first display panel 4311, the seconddisplay panel 4312, and the third display panel 4313, and an ELlight-emitting display panel or electronic paper may also be used. Thatis, the liquid crystal display device of Embodiments 1 to 7 is used forat least one of the three display panels. When one e-book readerincludes various kinds of display panels, an electronic paper displaypanel can be used outdoors in bright sunlight and the other panels areturned off so that power consumption is reduced, and a liquid crystaldisplay panel can be used in a dark environment to display images. Theelectronic paper is advantageous in that, after an image is displayedonce, the image can be kept even when the electronic paper is turnedoff. Meanwhile, it is difficult to display an image on the electronicpaper in a dark environment because the electronic paper is a reflectivedisplay device. Accordingly, an e-book reader including various kinds ofdisplay panels can be used in any place. Further, at least one of thethree display panels may be used for displaying full-color images, andthe other display panels may be used for displaying monochrome images.

In the e-book reader illustrated in FIG. 19B, the second display panel4312 includes the operation portion 4304, which can operate as a powersupply input switch, a display switching switch, and the like.

Data can be input to the e-book reader illustrated in FIG. 19B when thefirst display portion 4301 or the second display portion 4307 is touchedwith a finger or an input pen or when the operation portion 4304 isoperated. Note that display buttons 4309 are displayed on the seconddisplay portion 4307 in FIG. 19B, and data can be input to the e-bookreader when the display buttons 4309 are touched with a finger or thelike.

This application is based on Japanese Patent Application serial No.2009-131384 filed with Japan Patent Office on May 29, 2009, the entirecontents of which are hereby incorporated by reference.

What is claimed is:
 1. A liquid crystal display device comprising: afirst substrate; a transistor over the first substrate; first to thirdstructure bodies arranged in this order over the first substrate, thefirst to third structure bodies each protruding from the firstsubstrate; a first electrode layer over and in contact with the first tothird structure bodies; an insulating layer over the first electrodelayer, the insulating layer having an uneven surface due to the first tothird structure bodies; a second electrode layer over the insulatinglayer; a liquid crystal layer over the second electrode layer; and asecond substrate over the liquid crystal layer, wherein the firstelectrode layer is electrically connected to one of source and drainelectrodes of the transistor, wherein the first to third structurebodies do not overlap with the transistor, and wherein the secondelectrode layer covers top surfaces and side surfaces of the first andthird structure bodies, and does not cover the second structure body. 2.The liquid crystal display device according to claim 1, wherein theliquid crystal layer is capable of exhibiting a blue phase.
 3. Theliquid crystal display device according to claim 1, wherein the first tothird structure bodies comprise an organic resin material.
 4. The liquidcrystal display device according to claim 1, further comprising a thirdelectrode layer between the liquid crystal layer and the secondsubstrate.
 5. The liquid crystal display device according to claim 4,wherein the third electrode layer does not overlap the second electrodelayer.
 6. The liquid crystal display device according to claim 1,wherein the second electrode layer includes an opening which overlapsthe second structure body.
 7. The liquid crystal display deviceaccording to claim 1, wherein the insulating layer is in direct contactwith the first electrode layer and the second electrode layer.
 8. Aliquid crystal display device comprising: a first substrate; atransistor over the first substrate; first to third structure bodiesarranged in this order over the first substrate, the first to thirdstructure bodies each protruding from the first substrate; a firstelectrode layer over and in contact with the first to third structurebodies; an insulating layer over the first electrode layer, theinsulating layer having an uneven surface due to the first to thirdstructure bodies; a second electrode layer over the insulating layer; aliquid crystal layer over the second electrode layer; and a secondsubstrate over the liquid crystal layer, wherein the first electrodelayer is electrically connected to one of source and drain electrodes ofthe transistor, wherein the first to third structure bodies eachprotrude within the liquid crystal layer, and wherein the secondelectrode layer covers top surfaces and side surfaces of the first andthird structure bodies, and does not cover the second structure body. 9.The liquid crystal display device according to claim 8, wherein theliquid crystal layer is capable of exhibiting a blue phase.
 10. Theliquid crystal display device according to claim 8, wherein the first tothird structure bodies comprise an organic resin material.
 11. Theliquid crystal display device according to claim 8, further comprising athird electrode layer between the liquid crystal layer and the secondsubstrate.
 12. The liquid crystal display device according to claim 11,wherein the third electrode layer does not overlap the second electrodelayer.
 13. The liquid crystal display device according to claim 8,wherein the second electrode layer includes an opening which overlapsthe second structure body.
 14. The liquid crystal display deviceaccording to claim 8, wherein the insulating layer is in direct contactwith the first electrode layer and the second electrode layer.
 15. Aliquid crystal display device comprising: a first substrate; atransistor over the first substrate; first to third structure bodiesarranged in this order over the first substrate, the first to thirdstructure bodies each protruding from the first substrate; a firstelectrode layer over and in contact with the first to third structurebodies; an insulating layer over the first electrode layer, theinsulating layer having an uneven surface due to the first to thirdstructure bodies; a second electrode layer over the insulating layer; aliquid crystal layer over the second electrode layer; and a secondsubstrate over the liquid crystal layer, wherein the first electrodelayer is electrically connected to one of source and drain electrodes ofthe transistor, wherein the first to third structure bodies are in thesame plane with the transistor, and wherein the second electrode layercovers top surfaces and side surfaces of the first and third structurebodies, and does not cover the second structure body.
 16. The liquidcrystal display device according to claim 15, wherein the liquid crystallayer is capable of exhibiting a blue phase.
 17. The liquid crystaldisplay device according to claim 15, wherein the first to thirdstructure bodies comprise an organic resin material.
 18. The liquidcrystal display device according to claim 15, further comprising a thirdelectrode layer between the liquid crystal layer and the secondsubstrate.
 19. The liquid crystal display device according to claim 18,wherein the third electrode layer does not overlap the second electrodelayer.
 20. The liquid crystal display device according to claim 15,wherein the second electrode layer includes an opening which overlapsthe second structure body.
 21. The liquid crystal display deviceaccording to claim 15, wherein the insulating layer is in direct contactwith the first electrode layer and the second electrode layer.